Imec has developed a piezoelectric Micromachined Ultrasound Transducer (pMUT) array that is compatible with flat-panel-displays (FPD) process technologies. The array demonstrates acoustic pressures in mid-air above 1kPa, a pressure level relevant for enabling mid-air haptics and directed sound. Moving from wafer-based to FPD-compatible processes prepares the pMUT technology for the integration of future mid-air applications, …
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